The value of WebAccess HMI
and SCADA software to semiconductor equipment suppliers is
significant. WebAccess software allows you to improve your
business processes, providing you with:
- More productive field
- Optimized maintenance processes
- A new support tool that pays
for itself in reduced service cost
- And a flexible solution
customized to meet remote access requirements
For your customers WebAccess
- Improved machine
availability, productivity, and efficiency
- Reduced mean-time to detect,
diagnose, and repair
- Network and data security
- Lower total cost of
the needs of semiconductor equipment suppliers, and
chip makers better than any other HMI. with remote diagnostics
capabilities. This is accomplished
through firewall friendly, bi-directional communications,
insuring the highest level of security for fabs, yet
allowing you to provide unmatched service and support.
Remote diagnostics over the
Internet reduce equipment downtime
and optimize production. The ability for
vendors, system integrators, suppliers and technical support
personnel to connect to their equipment at a remote facility
via the Internet:
- Enable remote experts to help
diagnose and repair equipment quickly or remotely configure it for initial setup.
- Monitor remotely to detect issues before they occur, even detect and flag equipment variations from baseline performance
Benefits of Web Access
benefits of WebAccess include:
- Monitor remotely to detect issues before they occur, even detect and flag equipment variations from baseline performance.
- Potential to gain new markets, improve position in currently served markets and gain a general competitive edge.
- Reduce labor costs through a reduction in training time, leveraging existing skill level, remote problem resolution (reduction in travel related expenses), etc.
- Reduction of Mean Time to Repair (MTTR)
Remote Diagnostics and
provides the means to proactively monitor, remotely access,
diagnose, and communicate with thousands of devices worldwide
with complete security through corporate firewalls to your
information systems. Remote diagnostics reduce your reliance
on customers for information related to maintenance and
troubleshooting, minimizing downtime.
In the US medical device
market, statistics show that 15 to 20% of all service calls
result in "no problem found." WebAccess can enable
you to reduce or eliminate these needless service calls.
Remote diagnostics also provide the ability for the service
technician to determine what parts or materials are needed
based on a thorough and comprehensive analysis of the fault
conditions and root causes before going to the customer
Remote Maintenance and Upgrade
can be utilized to remotely maintain or modify system software
from a centralized location, without the need to send service
technicians in the field, or to rely on the customer to
perform the upgrade.
has the capability to notify through a variety of mechanisms,
including real-time alarming when problems occur, or when
certain monitored parameters fall outside predefined
Application of WebAccess in Semiconductor
semi-conductor applications for WebAccess are focused on
Facilities Monitoring and Control System, FMCS. The major
tasks for these facilities management are clean room control,
pure water systems, chemical and material supply, toxic gas
monitoring and supply, power system monitoring and waste water
12" DRAM Fabrication
A Qimonda Joint venture constructed a new 12" DRAM Fabrication facility. This new
Fab-2 was commissioned in March 2007 and uses Broadwin WebAccess
SCADA software to implement the Facilities Monitoring and Control
The Facilities Monitoring and Control
System at the FAB monitors:
- High Purity De-Ionized Water
- Waste Water Treatment
- Chemical Supplies
- Industrial Gases
- Fire Alarms.
Figure 1 - Redundant SCADA
nodes and redundant PLCs for De-Ionized Water system control
The FMCS provides continuous electric power to all FAB equipment, provides a constant supply of process gases and chemicals, provides pure De-Ionized water for processing, controls treatment of wastewater, optimizes HVAC systems for Class 1 and Class 100
clean room environments, monitors gas and chemical consumption, provides alarm messages for operators throughout the facility, monitors hazardous gas and chemical transport systems for
leaks, and monitors all systems for fire prevention and personnel safety.
The High Purity Water system, the Power & Electrical
system, the Gas Monitoring system, the HVAC system, the
I&C Safety system, the Waste Water Treatment
Systems and the Drain Systems each use two pairs of redundant SCADA nodes running Broadwin WebAccess HMI & SCADA software to provide
graphical interface, supervisory control and monitoring. The
Alarm panel system uses an additional 5 WebAccess SCADA nodes. And the remainder of the Facilities
systems use an additional 10 pair of redundant WebAccess SCADA
A failure in the primary SCADA node results in a seamless
switch to the backup SCADA node.
A total of 68 WebAccess SCADA nodes are used throughout the
facility. Redundant Siemens Simatic
S7-414H and non-redundant S7-414 PLC (programmable logic controllers) provide primary control and IO.
The reliability of the entire manufacturing facility plays an important role in increasing production yields. For example, a constant supply of consumable supplies is critical to IC fabrication. In addition, a fire accident could destroy the processing equipment, or toxic gas leaks could endanger personnel. The Facility Monitoring and Control System (FMCS) must respond immediately under critical conditions and provide continuous data access.
Qimonda Joint Venture
The Qimonda JV was incorporated on January 23rd, 2003.
Founded as a joint venture by Qimonda AG (Qimonda; formerly the memory products division of Siemens AG and, later, Infineon Technologies AG)
and Nanya Technology Corporation, the production facility has been designed to manufacture high-density
and high-performance commodity DRAM (Dynamic Random Access Memory) products using state of the art trench
technology. Through the contribution of Qimonda’s world leading technology and Nanya’s cost efficiency in mass
production, the joint venture has developed into an innovative company, which is highly productive, highly competitive
and on the leading edge within the DRAM industry.
BroadWin Technology, Inc., headquartered in San Ramon, California, is the
innovative supplier of industrial automation software, with installations worldwide. The company recently introduced WebAccess, the industry’s first fully
web browser-based software package for human-machine interfaces (HMI), and supervisory control and data acquisition (SCADA). Internet Explorer 7.0 supports all features of WebAccess.
For more information, visit BroadWin’s web site at
Chances are, not every company
will choose to enhance its existing control systems with state-of-the
art web technology. The choice is to make web technology work for you.
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