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WebAccess controls 12-inch DRAM Fab for Qimonda Joint Venture  

The reliability of a redundant Facilities Monitoring and Control System plays an important role in increasing DRAM production yields.

June 6, 2007 - San Ramon, California

A Qimonda Joint venture constructed a new 12" DRAM Fabrication facility. This new Fab-2 was commissioned in March 2007 and uses Broadwin WebAccess SCADA software to implement the Facilities Monitoring and Control System.

The Facilities Monitoring and Control System at the FAB monitors:
  • High Purity De-Ionized Water
  • Waste Water Treatment
  • Chemical Supplies
  • Industrial Gases
  • Electricity 
  • HVAC
  • Fire Alarms.

Figure 1 - Redundant SCADA nodes and redundant PLCs for De-Ionized Water system control

The FMCS provides continuous electric power to all FAB equipment, provides a constant supply of process gases and chemicals, provides pure De-Ionized water for processing, controls treatment of wastewater, optimizes HVAC systems for Class 1 and Class 100 clean room environments, monitors gas and chemical consumption, provides alarm messages for operators throughout the facility, monitors hazardous gas and chemical transport systems for leaks, and monitors all systems for fire prevention and personnel safety.

The High Purity Water system, the Power & Electrical system, the Gas Monitoring system, the HVAC system, the I&C Safety system,  the Waste Water Treatment Systems and the Drain Systems each use two pairs of redundant SCADA nodes running Broadwin WebAccess HMI & SCADA software to provide graphical interface, supervisory control and monitoring. The Alarm panel system uses an additional 5 WebAccess SCADA nodes.  And the remainder of the Facilities  systems use an additional 10 pair of redundant WebAccess SCADA nodes. A failure in the primary SCADA node results in a seamless switch to the backup SCADA node.   A total of 68 WebAccess SCADA nodes are used throughout the facility. Redundant Siemens Simatic S7-414H and non-redundant S7-414 PLC (programmable logic controllers) provide primary control and IO.

The reliability of the entire manufacturing facility plays an important role in increasing production yields. For example, a constant supply of consumable supplies is critical to IC fabrication. In addition, a fire accident could destroy the processing equipment, or toxic gas leaks could endanger personnel. The Facility Monitoring and Control System (FMCS) must respond immediately under critical conditions and provide continuous data access.

About the Qimonda Joint Venture

The Qimonda JV was incorporated on January 23rd, 2003. Founded as a joint venture by Qimonda AG (Qimonda; formerly the memory products division of Siemens AG and, later, Infineon Technologies AG)  and Nanya Technology Corporation, the production facility has been designed to manufacture high-density and high-performance commodity DRAM (Dynamic Random Access Memory) products using state of the art trench technology. Through the contribution of Qimonda’s world leading technology and Nanya’s cost efficiency in mass production, the joint venture has developed into an innovative company, which is highly productive, highly competitive and on the leading edge within the DRAM industry.

http://www.qimonda.com/
http://www.nanya.com/

About BroadWin Technology

BroadWin Technology, Inc., headquartered in San Ramon, California, is the innovative supplier of industrial automation software, with installations worldwide. The company recently introduced WebAccess, the industry’s first fully web browser-based software package for human-machine interfaces (HMI), and supervisory control and data acquisition (SCADA). Internet Explorer 7.0 supports all features of WebAccess. For more information, visit BroadWin’s web site at http://www.BroadWin.com.

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